JPH0536727B2 - - Google Patents

Info

Publication number
JPH0536727B2
JPH0536727B2 JP7977584A JP7977584A JPH0536727B2 JP H0536727 B2 JPH0536727 B2 JP H0536727B2 JP 7977584 A JP7977584 A JP 7977584A JP 7977584 A JP7977584 A JP 7977584A JP H0536727 B2 JPH0536727 B2 JP H0536727B2
Authority
JP
Japan
Prior art keywords
light
phase
object surface
photoelectric conversion
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7977584A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60224044A (ja
Inventor
Hiroo Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP7977584A priority Critical patent/JPS60224044A/ja
Priority to GB08412312A priority patent/GB2146116B/en
Publication of JPS60224044A publication Critical patent/JPS60224044A/ja
Publication of JPH0536727B2 publication Critical patent/JPH0536727B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7977584A 1983-05-13 1984-04-20 光ヘテロダイン干渉法による表面検査装置 Granted JPS60224044A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7977584A JPS60224044A (ja) 1984-04-20 1984-04-20 光ヘテロダイン干渉法による表面検査装置
GB08412312A GB2146116B (en) 1983-05-13 1984-05-14 Surface condition measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7977584A JPS60224044A (ja) 1984-04-20 1984-04-20 光ヘテロダイン干渉法による表面検査装置

Publications (2)

Publication Number Publication Date
JPS60224044A JPS60224044A (ja) 1985-11-08
JPH0536727B2 true JPH0536727B2 (en]) 1993-05-31

Family

ID=13699574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7977584A Granted JPS60224044A (ja) 1983-05-13 1984-04-20 光ヘテロダイン干渉法による表面検査装置

Country Status (1)

Country Link
JP (1) JPS60224044A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076922B2 (ja) * 1986-05-09 1995-01-30 シチズン時計株式会社 パタ−ン欠陥検出方法
US5343290A (en) * 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer
JP4610117B2 (ja) * 2001-03-29 2011-01-12 富士フイルム株式会社 フーリエ変換縞解析方法および装置

Also Published As

Publication number Publication date
JPS60224044A (ja) 1985-11-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term